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    Cited By (12)

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      DE-19638100-C1March 05, 1998Fraunhofer Ges ForschungVorrichtung zum Erzeugen eines dampfförmigen Reaktionsproduktes aus Feststoffteilen
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      US-7833353-B2November 16, 2010Asm Japan K.K.Liquid material vaporization apparatus for semiconductor processing apparatus
      US-7851019-B2December 14, 2010Asm International N.V.Method for controlling the sublimation of reactants
      US-7971861-B2July 05, 2011Asm International N.V.Safe liquid source containers
      US-8012876-B2September 06, 2011Asm International N.V.Delivery of vapor precursor from solid source
      US-8309173-B2November 13, 2012Asm International N.V.System for controlling the sublimation of reactants
      US-8343583-B2January 01, 2013Asm International N.V.Method for vaporizing non-gaseous precursor in a fluidized bed
      US-9117773-B2August 25, 2015Asm America, Inc.High concentration water pulses for atomic layer deposition